Alumina ceramic end effector/ceramic robotic arm:

Ceramic end effectors, also known as ceramic fingers, ceramic arms, ceramic robotic arms, etc., (ceramic arms) constitute the end of the robotic arm for manipulating and moving semiconductor wafers between different positions. It's basically a robotic hand, so its thermal and dimensional stability is important, and it doesn't contaminate the chamber with particles or chemical contaminants.

The role of ceramic end effectors:

Ceramic arms are used to manipulate and carry silicon wafers throughout the production process of semiconductor processing (semiconductor wafer fabrication). It can handle large wafers and vacuum channels can be designed to hold parts.The following is a display of several products produced by our company: